Gate cut device fabrication with extended height gates

ABSTRACT

Methods of forming semiconductor devices include forming a lower dielectric layer to a height below a height of a dummy gate hardmask disposed across multiple device regions. The dummy gate structure includes a dummy gate and a dummy gate hardmask. A protective layer is formed on the dielectric layer to the height of the dummy gate hardmask. The dummy gate hardmask is etched back to expose the dummy gate.

BACKGROUND Technical Field

The present invention generally relates to semiconductor devicefabrication and, more particularly, to fabrication of semiconductordevices using a gate cut process.

Description of the Related Art

Gate cut processes in the fabrication of semiconductor devices such as,e.g., field effect transistors (FETs) form multiple devices in a singleprocess by forming a single dummy gate, cutting the dummy gate intomultiple sections, and subsequently replacing the sections withrespective final gates. To accomplish this, existing gate cut processesdeposit a layer of oxide material around the dummy gates to define thegate region while the gate cut is performed.

However, the etching processes that are used to perform the gate cut aregenerally poorly selective between the surrounding oxide material andthe nitride material that is often used as a dummy gate hardmask. As aresult, when the dummy gate hardmask is etched away, some of thesurrounding oxide material is removed as well, creating a recess in thislayer. Because the surrounding oxide material is used to define theheight of the replacement gate structure, this also results in adecrease in the height of the replacement gate. Additionally, gatematerial from the formation of the replacement gate may accumulate inthe recesses of the surrounding oxide material.

SUMMARY

A method of forming semiconductor devices includes forming a lowerdielectric layer to a height below a height of a dummy gate hardmaskdisposed across multiple device regions. The dummy gate structureincludes a dummy gate and a dummy gate hardmask. A protective layer isformed on the dielectric layer to the height of the dummy gate hardmask.The dummy gate hardmask is etched back to expose the dummy gate.

A method of forming semiconductor devices includes forming a lowerdielectric layer to a height below a height of a dummy gate hardmaskdisposed across multiple device regions. The dummy gate structureincludes a dummy gate and a dummy gate hardmask. A protective layer isformed on the dielectric layer to the height of the dummy gate hardmask.The dummy gate hardmask is etched back to expose the dummy gate. Theprotective layer is converted to an upper dielectric layer. The dummygate is removed in one or more barrier regions. A dielectric barrier isformed in the one or more barrier regions.

These and other features and advantages will become apparent from thefollowing detailed description of illustrative embodiments thereof,which is to be read in connection with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The following description will provide details of preferred embodimentswith reference to the following figures wherein:

FIG. 1 is a top-down view of a step in the formation of semiconductordevices in accordance with the present principles;

FIG. 2 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 3 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 4 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 5 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 6 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 7 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 8 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 9 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 10 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 11 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 12 is a cross-sectional view of a step in the formation ofsemiconductor devices in accordance with the present principles;

FIG. 13 is a block/flow diagram of a method of forming semiconductordevices in accordance with the present principles; and

FIG. 14 is a cross-sectional view of a semiconductor device inaccordance with the present principles.

DETAILED DESCRIPTION

Embodiments of the present invention use a layer of etch stop materialon top of a layer of oxide material to prevent damage to the layer ofoxide material during a gate cut process. This etch stop material maylater be replaced or oxidized to form an appropriate dielectric materialbetween device components.

Referring now to FIG. 1, a top-down view of a step in the formation of asemiconductor device is shown. A semiconductor substrate 102 is shown,with a dummy gate structure 106 and source/drain regions 104 shown onthe semiconductor substrate. Additionally, cuts A and B are shown. CutsA and B will form the basis for subsequent descriptions of thestructures herein, with cross-sectional diagrams along each cut beingprovided.

The semiconductor substrate 102 may be a bulk-semiconductor substrate.In one example, the bulk-semiconductor substrate may be asilicon-containing material. Illustrative examples of silicon-containingmaterials suitable for the bulk-semiconductor substrate include, but arenot limited to, silicon, silicon germanium, silicon germanium carbide,silicon carbide, polysilicon, epitaxial silicon, amorphous silicon, andmulti-layers thereof. Although silicon is the predominantly usedsemiconductor material in wafer fabrication, alternative semiconductormaterials can be employed, such as, but not limited to, germanium,gallium arsenide, gallium nitride, cadmium telluride, and zinc selenide.Although not depicted in the present figures, the semiconductorsubstrate 102 may also be a semiconductor on insulator (SOI) substrate.

It should furthermore be understood that, although the presentembodiments are depicted specifically in the context of planar-channeldevices, with a transistor channel being formed in the surface of thesubstrate 102, alternative embodiments may employ any appropriatevariety of channel structure including, without limitation, fin channelstructures, nanowire channel structures, nanosheet channel structures,etc.

Referring now to FIG. 2, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. The dummy gatestructure 106 is shown in additional detail as including a dummy gate202 and a dummy gate hardmask 204 that includes a top portion andsidewalls. It is specifically contemplated that the dummy gate 202 maybe formed from, e.g., polysilicon, but it should be understood that thedummy gate may be formed from any material having strong etchselectivity with the material of the hardmask 204. It should be notedthat there are practical limits to the height to which the dummy gate202 may initially be formed. In particular, tall, thin structures maybecome malformed, for example due to other processing steps and etcheson the chip. However, it is advantageous that the final gate structurebe as tall as possible.

It is specifically contemplated that the hardmask 204, in turn, may beformed from silicon nitride. In one embodiment, the hardmask 204 may beformed from two separate structures and/or materials, with verticalsidewalls forming one such structure and a top hardmask forming thesecond such structure. This detail is omitted in the followingdiscussion, but it should be understood that any of the presentembodiments may be formed with a single material hardmask or withhardmasks made of multiple materials.

As used herein, the term “selective” in reference to a material removalprocess denotes that the rate of material removal for a first materialis greater than the rate of removal for at least a second material ofthe structure to which the material removal process is being applied.The degree of selectivity describes the relative rate of removal, with ahigher selectivity corresponding to less of the second material beingremoved.

A dielectric layer 206 is deposited over the source/drain regions 104.It is specifically contemplated that the dielectric layer 206 may beformed using a flowable chemical vapor deposition (FCVD) process andthat the dielectric layer 206 may be formed from silicon dioxide. Itshould be understood that any appropriate dielectric or insulatingmaterial may be used instead of silicon dioxide, though it isspecifically contemplated that the material of the dielectric layer 206may have poor etch selectivity with the material of the hardmask 204.After deposition of the dielectric material, the layer is polished downto the level of the hardmask 204 using, e.g., chemical mechanicalplanarization.

It should be understood that, although FCVD is specificallycontemplated, it should be understood that the dielectric layer 206 maybe formed by any appropriate process including, e.g., chemical vapordeposition (CVD), physical vapor deposition (PVD), atomic layerdeposition (ALD), or gas cluster ion beam (GCIB) deposition. CVD is adeposition process in which a deposited species is formed as a result ofchemical reaction between gaseous reactants at greater than roomtemperature (e.g., from about 25° C. about 900° C.). The solid productof the reaction is deposited on the surface on which a film, coating, orlayer of the solid product is to be formed. Variations of CVD processesinclude, but are not limited to, Atmospheric Pressure CVD (APCVD), LowPressure CVD (LPCVD), Plasma Enhanced CVD (PECVD), and Metal-Organic CVD(MOCVD) and combinations thereof may also be employed. In alternativeembodiments that use PVD, a sputtering apparatus may includedirect-current diode systems, radio frequency sputtering, magnetronsputtering, or ionized metal plasma sputtering. In alternativeembodiments that use ALD, chemical precursors react with the surface ofa material one at a time to deposit a thin film on the surface. Inalternative embodiments that use GCIB deposition, a high-pressure gas isallowed to expand in a vacuum, subsequently condensing into clusters.The clusters can be ionized and directed onto a surface, providing ahighly anisotropic deposition.

CMP is performed using, e.g., a chemical or granular slurry andmechanical force to gradually remove upper layers of the device. Theslurry may be formulated to be unable to dissolve, for example, the workfunction metal layer material, resulting in the CMP process's inabilityto proceed any farther than that layer.

Referring now to FIG. 3, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut B. The gate 202is shown unbroken, with a hardmask layer 204 on top. It should be notedthat this gate structure will be cut into two or more pieces by thepresent embodiments, such that multiple devices can be formed.

Referring now to FIG. 4, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. The dielectriclayer 206 is recessed below the height of the hardmask layer 204 using,e.g., a wet or dry chemical etch or any appropriate anisotropic etch, toproduce recessed dielectric layer 402.

Referring now to FIG. 5, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. A protectivelayer 502 is formed over the recessed dielectric layer 402. It isspecifically contemplated that the protective layer 502 may be formedfrom polysilicon, but it should be understood that other materials maybe used instead. In particular, it is contemplated that the material ofthe protective layer 502 should be oxidizable to form a same material asmakes up the recessed dielectric layer 402. The protective layer 502covers the surface of the recessed dielectric layer 402 to prevent thatsurface from being damaged by subsequent processes.

Referring now to FIG. 6, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. The nitridehardmask 204 is etched down to expose the dummy gate 202. This etch maybe performed with any appropriate isotropic or anisotropic etch thatremoves material from the hardmask 204 with a high degree of selectivityto the protective layer 502, such that the protective layer 502 isnearly or entirely undamaged by the etch.

Referring now to FIG. 7, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. A sacrificialfilm 702 is deposited in the gap above the gate 202. It should beunderstood that the sacrificial film 702 may be any appropriate materialthat will protect the underlying gate 202 from subsequent processingsteps. In one embodiment, the sacrificial film 702 may be formed from,e.g., silicon oxygen carbide or low density (hydrogen-rich) siliconnitride, which is easier to remove than higher density silicon nitride.

Referring now to FIG. 8, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. The protectivelayer 502 is chemically altered to form a dielectric layer 802. It isspecifically contemplated that, in the case where the protective layer502 is formed from polysilicon, the dielectric layer 802 will be silicondioxide. The material of the dielectric layer 802 may be the same as thematerial of the recessed dielectric layer 402 or may be a differentmaterial. In one specific embodiment, a wet oxidation at about 400° C.may be used.

One side effect of the conversion of the dielectric layer 802 may beoxidation of the surface of the sacrificial film 702. If so, anisotropic etch may be used to etch back and fully expose the sacrificialfilm 702. It should also be noted that the oxidation process that turnspolysilicon into silicon dioxide will cause the dielectric layer 802 toincrease in thickness relative to the original protective layer 502. Asa result of this increase in thickness, the gap above the dummy gate 202also increases, which results in taller gate structures during latergate replacement processes.

Even if both the recessed dielectric layer 402 and the dielectric layer802 are both formed from silicon dioxide, the internal structures of therespective materials will be different due to their different processesof formation. For example, the recessed dielectric layer 402 may beformed from a FCVD process, which produces a relatively low-qualitysilicon dioxide structure as compared to a thermal oxidation processwhich may be used to form the top dielectric layer 802.

Referring now to FIG. 9, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. A gate cutmask 902 is formed over the dielectric layer 802 and the sacrificialliner 702 is removed. The gate mask 902 may be formed by applying aphotoresist material to the surface of the dielectric layer 802. Thephotoresist material is exposed to a pattern of radiation thatselectively cures the material, such that uncured material over the gatecut region may be removed. The sacrificial liner 702 can then be removedwithout harming other structures on the chip.

Referring now to FIG. 10, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. The dummy gate202 is etched away, leaving sidewalls 204 defining the gate region. Theetch is selective to the dielectric material of the dielectric layer802.

Referring now to FIG. 11, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut B. The gate cut1104 is shown dividing the dummy gate 202 into sections 1102. The gatecut mask 902 can be formed to create as many cuts as are needed toseparate the dummy gate 202 into the appropriate number of sections1102.

Referring now to FIG. 12, a cross-sectional view of a step in theformation of a semiconductor device is shown along cut A. The dummy gatesections 1102 are etched away and replaced by an appropriate gatestructure 1202.

It is to be understood that aspects of the present invention will bedescribed in terms of a given illustrative architecture; however, otherarchitectures, structures, substrate materials and process features andsteps can be varied within the scope of aspects of the presentinvention.

It will also be understood that when an element such as a layer, regionor substrate is referred to as being “on” or “over” another element, itcan be directly on the other element or intervening elements can also bepresent. In contrast, when an element is referred to as being “directlyon” or “directly over” another element, there are no interveningelements present. It will also be understood that when an element isreferred to as being “connected” or “coupled” to another element, it canbe directly connected or coupled to the other element or interveningelements can be present. In contrast, when an element is referred to asbeing “directly connected” or “directly coupled” to another element,there are no intervening elements present.

The present embodiments can include a design for an integrated circuitchip, which can be created in a graphical computer programming language,and stored in a computer storage medium (such as a disk, tape, physicalhard drive, or virtual hard drive such as in a storage access network).If the designer does not fabricate chips or the photolithographic masksused to fabricate chips, the designer can transmit the resulting designby physical means (e.g., by providing a copy of the storage mediumstoring the design) or electronically (e.g., through the Internet) tosuch entities, directly or indirectly. The stored design is thenconverted into the appropriate format (e.g., GDSII) for the fabricationof photolithographic masks, which typically include multiple copies ofthe chip design in question that are to be formed on a wafer. Thephotolithographic masks are utilized to define areas of the wafer(and/or the layers thereon) to be etched or otherwise processed.

Methods as described herein can be used in the fabrication of integratedcircuit chips. The resulting integrated circuit chips can be distributedby the fabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged chips), as a bare die, or in a packaged form. In thelatter case, the chip is mounted in a single chip package (such as aplastic carrier, with leads that are affixed to a motherboard or otherhigher level carrier) or in a multichip package (such as a ceramiccarrier that has either or both surface interconnections or buriedinterconnections). In any case, the chip is then integrated with otherchips, discrete circuit elements, and/or other signal processing devicesas part of either (a) an intermediate product, such as a motherboard, or(b) an end product. The end product can be any product that includesintegrated circuit chips, ranging from toys and other low-endapplications to advanced computer products having a display, a keyboardor other input device, and a central processor.

It should also be understood that material compounds will be describedin terms of listed elements, e.g., SiGe. These compounds includedifferent proportions of the elements within the compound, e.g., SiGeincludes Si_(x)Ge_(1-x) where x is less than or equal to 1, etc. Inaddition, other elements can be included in the compound and stillfunction in accordance with the present principles. The compounds withadditional elements will be referred to herein as alloys.

Reference in the specification to “one embodiment” or “an embodiment”,as well as other variations thereof, means that a particular feature,structure, characteristic, and so forth described in connection with theembodiment is included in at least one embodiment. Thus, the appearancesof the phrase “in one embodiment” or “in an embodiment”, as well anyother variations, appearing in various places throughout thespecification are not necessarily all referring to the same embodiment.

It is to be appreciated that the use of any of the following “/”,“and/or”, and “at least one of”, for example, in the cases of “A/B”, “Aand/or B” and “at least one of A and B”, is intended to encompass theselection of the first listed option (A) only, or the selection of thesecond listed option (B) only, or the selection of both options (A andB). As a further example, in the cases of “A, B, and/or C” and “at leastone of A, B, and C”, such phrasing is intended to encompass theselection of the first listed option (A) only, or the selection of thesecond listed option (B) only, or the selection of the third listedoption (C) only, or the selection of the first and the second listedoptions (A and B) only, or the selection of the first and third listedoptions (A and C) only, or the selection of the second and third listedoptions (B and C) only, or the selection of all three options (A and Band C). This can be extended, as readily apparent by one of ordinaryskill in this and related arts, for as many items listed.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of exampleembodiments. As used herein, the singular forms “a,” “an,” and “the” areintended to include the plural forms as well, unless the context clearlyindicates otherwise. It will be further understood that the terms“comprises,” “comprising,” “includes” and/or “including,” when usedherein, specify the presence of stated features, integers, steps,operations, elements and/or components, but do not preclude the presenceor addition of one or more other features, integers, steps, operations,elements, components and/or groups thereof.

Spatially relative terms, such as “beneath,” “below,” “lower,” “above,”upper, and the like, can be used herein for ease of description todescribe one element's or feature's relationship to another element(s)or feature(s) as illustrated in the FIGS. It will be understood that thespatially relative terms are intended to encompass differentorientations of the device in use or operation in addition to theorientation depicted in the FIGS. For example, the device in the FIGS,is turned over, elements described as “below” or “beneath” otherelements or features would then be oriented “above” the other elementsor features. Thus, the term “below” can encompass both an orientation ofabove and below. The device can be otherwise oriented (rotated 90degrees or at other orientations), and the spatially relativedescriptors used herein can be interpreted accordingly. In addition, itwill also be understood that when a layer is referred to as being“between” two layers, it can be the only layer between the two layers,or one or more intervening layers can also be present.

It will be understood that, although the terms first, second, etc. canbe used herein to describe various elements, these elements should notbe limited by these terms. These terms are only used to distinguish oneelement from another element. Thus, a first element discussed belowcould be termed a second element without departing from the scope of thepresent concept.

Referring now to FIG. 13, a method of forming a semiconductor device isshown. Block 1302 forms a dummy gate structure 106 that may include,e.g., a dummy gate 202 and a dummy gate hardmask 204. Block 1304 thenfills in dielectric layer 206 to the height of the dummy gate structure106, for example by depositing a flowable silicon dioxide and thenpolishing the material down to the level of the dummy gate hardmask 204using, e.g., CMP. Block 1306 then recesses the dielectric layer 206below the height of the dummy gate hardmask 204.

Block 1308 forms protective layer 502 on top of the recessed dielectriclayer 402, up to the height of the dummy gate hardmask 204. Theprotective layer 502 may be formed from, e.g., polysilicon and may bedeposited by any appropriate deposition process, then polished down.Block 1310 etches the dummy gate hardmask 204 down to at least theheight of the dummy gate 202 and block 702 forms a sacrificial liner 702over the dummy gate 202.

Block 1314 causes a chemical change in the protective layer 502 totransform that layer into a dielectric layer 802. It is specificallycontemplated that a thermal oxidation process may be employed to changepolysilicon into a high-quality silicon dioxide (contrasted to thelower-quality silicon dioxide of the recessed dielectric layer 402).Block 1316 then etches away the sacrificial liner 702 to expose thedummy gate 202.

Block 1318 forms a cut in the dummy gate 202, separating the dummy gate202 into multiple sections 1102. Block 1320 fills the cut area with adielectric material such as, e.g., silicon nitride. Block 1322 thenreplaces the remaining dummy gate sections 1102 with, e.g., metal gatestructures. Block 1324 finishes the devices by forming, e.g., electricalcontacts to the gates and to source/drain regions.

Referring now to FIG. 14, a cross-sectional view of a semiconductordevice is shown. A gate dielectric 1402 is deposited and a replacementgate 1404 is filled into the gap. The gate dielectric 1402 may be formedfrom any appropriate dielectric material including, e.g., silicondioxide or a high-k dielectric such as oxides of tantalum, zirconium,aluminum, or combinations thereof. The replacement gate 1404 may beformed from any appropriate conducting metal such as, e.g., tungsten,nickel, titanium, molybdenum, tantalum, copper, platinum, silver, gold,rubidium, iridium, rhenium, and rhodium. Contacts 1406 are formed thatpierce the upper dielectric layer 802 and the recessed dielectric layer402 to contact the source/drain regions.

It should be noted that the finished device does not suffer fromrecesses in the surface of the top dielectric layer 802 that wouldotherwise result from the etch in block 1310. In addition, a top portionof the replacement gate structure will be significantly taller thanwould have been possible otherwise, due first to the lack of etching ofthe top dielectric layer and second to the increase in thickness thatresults from oxidizing polysilicon to form silicon dioxide. Thisincreased height provides superior device characteristics, but does notsuffer from the low yield that might result from forming the initialdummy gate 202 to the desired final gate height.

Having described preferred embodiments of a system and method (which areintended to be illustrative and not limiting), it is noted thatmodifications and variations can be made by persons skilled in the artin light of the above teachings. It is therefore to be understood thatchanges may be made in the particular embodiments disclosed which arewithin the scope of the invention as outlined by the appended claims.Having thus described aspects of the invention, with the details andparticularity required by the patent laws, what is claimed and desiredprotected by Letters Patent is set forth in the appended claims.

What is claimed is:
 1. A method of forming semiconductor devicescomprising: forming a lower dielectric layer to a height below a heightof a dummy gate hardmask disposed across multiple device regions,wherein the dummy gate structure includes a dummy gate and a dummy gatehardmask; forming a protective layer on the dielectric layer to theheight of the dummy gate hardmask; and etching back the dummy gatehardmask to expose the dummy gate.
 2. The method of claim 1, whereinforming the lower dielectric layer comprises forming a dielectric fillto the height of the dummy gate hardmask and etching the dielectric fillback.
 3. The method of claim 1, wherein a thickness of the upperdielectric layer is greater than a thickness of the protective layer. 4.The method of claim 1, further comprising converting the protectivelayer to an upper dielectric layer.
 5. The method of claim 4, whereinconverting the protective layer comprises oxidizing the protectivelayer.
 6. The method of claim 5, wherein the protective layer is formedfrom polysilicon and wherein converting the protective layer oxidizesthe polysilicon to silicon dioxide.
 7. The method of claim 4, furthercomprising forming a sacrificial liner over the dummy gate after thedummy gate hardmask is etched back to protect the dummy gate from theconversion of the protective layer.
 8. The method of claim 7, furthercomprising etching away the sacrificial liner after converting theprotective layer.
 9. The method of claim 1, further comprising: removingthe dummy gate in one or more barrier regions; and forming a dielectricbarrier in the one or more barrier regions
 10. The method of claim 9,further comprising replacing the dummy gate in regions outside the oneor more barrier regions to form a plurality of final gates.
 11. Themethod of claim 10, wherein replacing the dummy gate comprisesdepositing dummy gate material to a height above a height of theoriginal dummy gate hardmask.
 12. A method of forming semiconductordevices comprising: forming a lower dielectric layer to a height below aheight of a dummy gate hardmask disposed across multiple device regions,wherein the dummy gate structure includes a dummy gate and a dummy gatehardmask; forming a protective layer on the dielectric layer to theheight of the dummy gate hardmask; etching back the dummy gate hardmaskto expose the dummy gate; converting the protective layer to an upperdielectric layer; removing the dummy gate in one or more barrierregions; and forming a dielectric barrier in the one or more barrierregions.
 13. The method of claim 12, wherein forming the lowerdielectric layer comprises forming a dielectric fill to the height ofthe dummy gate hardmask and etching the dielectric fill back.
 14. Themethod of claim 12, wherein a thickness of the upper dielectric layer isgreater than a thickness of the protective layer.
 15. The method ofclaim 12, wherein converting the protective layer comprises oxidizingthe protective layer.
 16. The method of claim 15, wherein the protectivelayer is formed from polysilicon and wherein converting the protectivelayer oxidizes the polysilicon to silicon dioxide.
 17. The method ofclaim 12, further comprising forming a sacrificial liner over the dummygate after the dummy gate hardmask is etched back to protect the dummygate from the conversion of the protective layer.
 18. The method ofclaim 17, further comprising etching away the sacrificial liner afterconverting the protective layer.
 19. The method of claim 18, furthercomprising replacing the dummy gate in regions outside the one or morebarrier regions to form a plurality of final gates.
 20. The method ofclaim 19, wherein replacing the dummy gate comprises depositing dummygate material to a height above a height of the original dummy gatehardmask